Traveling wave ultrasonic micromotors fabricated from a single layer of homogeneous bulk piezoelectric lead zirconate titanate (PZT) are described. The miniature motors are capable of bi-directional rotary motion with controllable speeds. By taking advantage of transverse interdigitated electrodes to excite traveling waves in a patterned bulk PZT substrate, the monolithic micromotor stators are patterned using a simple and low cost fabrication technique based on micropowder blasting. Performance of the ultrasonic micromotors is explored using devices with integrated glass rotors, using defined preload forces applied between the microfabricated stator and rotor elements. For the case of a 4.12 mm diameter PZT stator, a maximum speed of 30 rpm and stall torque of 501 mN $\cdot $ mm are achieved when applying a 323 mN preload force to the rotor. [2017-0257]

中文翻译：

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用于低速高扭矩旋转驱动的微型散装 PZT 行波超声波电机

描述了由单层均质体压电锆钛酸铅 (PZT) 制成的行波超声波微电机。微型电机能够以可控速度进行双向旋转运动。通过利用横向交叉电极在图案化的体 PZT 基板中激发行波，使用基于微粉爆破的简单且低成本的制造技术对单片微电机定子进行图案化。使用带有集成玻璃转子的设备，使用施加在微制造定子和转子元件之间的定义的预加载力来探索超声波微电机的性能。对于直径为 4.12 mm 的 PZT 定子，当对转子施加 323 mN 的预载力时，可实现 30 rpm 的最大速度和 501 mN $\cdot $ mm 的失速扭矩。