Multimode interference (MMI) waveguides can be used for multiplexing and de-multiplexing optical signals. High fidelity, wavelength dependent multi-spot patterns from MMI waveguides are useful for sensitive and simultaneous identification of multiple targets in multiplexed fluorescence optofluidic biosensors. Through experiments and simulation, this paper explores design parameters for an MMI rib anti-resonant reflecting optical waveguide in order to produce high fidelity spot patterns at the liquid core biomarker excitation region. Width and etch depth of the single excitation rib waveguide used to excite the MMI waveguide are especially critical because they determine the size of the input optical mode which is imaged at the MMI waveguide’s output. To increase optical throughput into the MMI waveguide when light is coupled in from an optical fiber, tapers in the waveguide width can be used for better mode matching.

中文翻译：

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优化的基于 ARROW 的 MMI 波导，用于光流体复用的高保真激励模式

多模干涉 (MMI) 波导可用于复用和解复用光信号。来自 MMI 波导的高保真度、波长相关的多点图案可用于灵敏和同时识别多重荧光光流体生物传感器中的多个目标。通过实验和模拟，本文探讨了 MMI 肋反共振反射光波导的设计参数，以在液芯生物标志物激发区域产生高保真光斑图案。用于激发 MMI 波导的单激发肋形波导的宽度和蚀刻深度尤其重要，因为它们决定了在 MMI 波导输出处成像的输入光模的大小。