Ultrahigh vacuum systems must often be constructed of materials with ultralow outgassing rates to achieve pressure of 10−6 Pa and below. Any component placed into the ultrahigh vacuum system must also be constructed of materials with ultralow outgassing rates. Baking stainless steel vacuum components to a temperature range of 400–450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultrahigh vacuum systems. The design, construction, and operation of a vacuum furnace capable of baking vacuum components to a temperature of 450 °C while maintaining a pressure of 10−3 Pa or lower is described. The furnace has been used for extended bakes at 450 °C while maintaining pressures below 10−5 Pa. As an example, the authors obtained an outgassing rate of 1.2 × 10−9 Pa l s−1 for a gate valve baked for 20 days at a temperature of 420 °C.

中文翻译：

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用于不锈钢真空元件脱气的真空炉

超高真空系统通常必须由具有超低排气率的材料构成，以实现 10−6 Pa 及以下的压力。放置在超高真空系统中的任何组件也必须由具有超低脱气率的材料制成。在真空下将不锈钢真空组件烘烤至 400–450 °C 的温度范围是降低超高真空系统中使用的真空组件脱气率的有效方法。描述了真空炉的设计、构造和操作，该真空炉能够将真空组件烘烤至 450 °C 的温度，同时保持 10−3 Pa 或更低的压力。该炉已用于在 450 °C 下进行长时间烘烤，同时保持压力低于 10−5 Pa。例如，作者获得了在 450 °C 下烘烤 20 天的闸阀的脱气率为 1.2 × 10−9 Pa ls−1。温度为420°C。