The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.

中文翻译：

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Parylene MEMS 电热阀

描述了第一个使用 Parylene C 构造的微机电系统常闭电热阀，它可以实现低功率（以毫瓦为单位）和快速操作（以毫秒为单位）。这种低功率阀门非常适用于无线控制的植入式药物输送系统。使用理论和建模对简单的设计进行分析，然后在台式实验中进行表征。演示了在空气（恒定电流）和水中（电流斜坡）中的操作。空气中的开阀功率为 22 mW，水中的开阀功率为 33 mW。在将阀门与导管集成后，我们的阀门被应用于无线操作的微量输液泵，并证明了该泵在未来小动物脑图谱应用中的适当使用的体内功能。