Development of PMN-PT single crystal/epoxy 1-3 composites for high-frequency ultrasonic transducers application is presented. The composite was fabricated by using a DRIE dry etching process with a 45% volume fraction of PMN-PT. A 35 MHz ultrasound flat transducer was fabricated with the composite, which was found to have an effective electromechanical coupling coefficient of 0.81, an insertion loss of 18 db, and a -6 dB bandwidth as high as 100%. Tungsten wire phantom image shows that the transducer had an axial resolution of 30 μm, which was in good agreement with the theoretical expectation. The initial results showed that the PMN-PT/epoxy 1-3 composite has many attractive properties over conventional piezoelectric materials for medical imaging applications.

中文翻译：

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用于超声成像应用的高频 PMN-PT 1-3 复合传感器。

介绍了用于高频超声换能器应用的 PMN-PT 单晶/环氧树脂 1-3 复合材料的开发。该复合材料是通过使用 45% 体积分数的 PMN-PT 的 DRIE 干法蚀刻工艺制造的。用该复合材料制造了 35 MHz 超声平面换能器，发现其有效机电耦合系数为 0.81，插入损耗为 18 db，-6 dB 带宽高达 100%。钨丝体模图像显示换能器的轴向分辨率为 30 μm，与理论预期非常吻合。初步结果表明，PMN-PT/环氧树脂 1-3 复合材料比用于医学成像应用的传统压电材料具有许多吸引人的特性。