The dynamics of nanopore formation in metal membranes using the highly focused and high energy electron beams (e-beams) of transmission electron microscopy instruments was investigated. Various metals such as Al, Ti, Cr, Cu, and Au were selected to investigate the effect of the atomic mass of the metal on nanopore drilling, namely, elastic versus inelastic scattering. We demonstrated that the effect of elastic scattering (pore formation by sputtering) decreased as the atomic mass of the metal increased. Furthermore, experimental cross-sections obtained from normalized drilled volume vs. electron dose curves (characteristic contrast curves) matched well the calculated atomic displacement cross-sections determined from elastic scattering data. The sputtering energies of Ti, Cr, and Cu were determined to be approximately 10, 9, and 7 eV, respectively, which were in good agreement with the reported range of sputtering energy values.

中文翻译：

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电子在金属膜上散射的动力学：使用透射电子显微镜在金属膜中形成纳米孔。

研究了使用透射电子显微镜仪器的高聚焦和高能电子束（电子束）在金属膜中形成纳米孔的动力学。选择各种金属，例如Al，Ti，Cr，Cu和Au，以研究金属原子质量对纳米孔钻孔的影响，即弹性与非弹性散射。我们证明，随着金属原子量的增加，弹性散射（通过溅射形成孔）的效果降低。此外，从归一化的钻孔体积与电子剂量曲线（特征对比曲线）获得的实验截面与根据弹性散射数据确定的计算得出的原子位移截面非常吻合。Ti，Cr和Cu的溅射能量分别约为10 eV，9 eV和7 eV。