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Double-Sided Design of Electrodes Driving Tunable Dielectrophoretic Miniature Lens
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2017-10-01 , DOI: 10.1109/jmems.2017.2711966
Yousuf Almoallem 1 , Hongrui Jiang 2
Affiliation  

We demonstrate the design methodology, geometrical analysis, device fabrication, and testing of a double-sided design of tunable-focus dielectrophoretic liquid miniature lenses. This design is intended to reduce the driving voltage for tuning the lens, utilizing a double-sided electrode design that enhances the electric field magnitude. Fabricated devices were tested and measurements on a goniometer showed changes of up to 14° in the contact angle when the dielectrophoretic force was applied under 25 Vrms. Correspondingly, the back focal length of the liquid lens changed from 67.1 to 14.4 mm when the driving voltage was increased from 0 to 25 Vrms. The driving voltage was significantly lower than those previously reported with similar device dimensions using single-sided electrode designs. This design allows for a range of both positive and negative menisci dependent on the volume of the lens liquid initially dispensed. [2017-0011]

中文翻译:

驱动可调介电泳微型透镜的电极的双面设计

我们展示了可调焦介电泳液体微型透镜的双面设计的设计方法、几何分析、器件制造和测试。这种设计旨在降低用于调谐镜头的驱动电压,利用增强电场强度的双面电极设计。当在 25 Vrms 下施加介电泳力时,对制造的装置进行了测试,在测角仪上的测量结果显示,接触角的变化高达 14°。相应地,当驱动电压从 0 Vrms 增加到 25 Vrms 时,液体透镜的后焦距从 67.1 mm 变为 14.4 mm。驱动电压明显低于先前报道的使用单侧电极设计的类似器件尺寸。这种设计允许取决于最初分配的镜片液体的体积的正负弯月面的范围。[2017-0011]
更新日期:2017-10-01
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