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Effective attenuation lengths for quantitative determination of surface composition by Auger-electron spectroscopy and X-ray photoelectron spectroscopy
Journal of Electron Spectroscopy and Related Phenomena ( IF 1.9 ) Pub Date : 2017-07-01 , DOI: 10.1016/j.elspec.2017.04.008
A Jablonski 1 , C J Powell 2
Affiliation  

The effective attenuation length (EAL) is normally used in place of the inelastic mean free path (IMFP) to account for elastic-scattering effects when describing the attenuation of Auger electrons and photoelectrons from a planar substrate by an overlayer film. An EAL for quantitative determination of surface composition by Auger-electron spectroscopy (AES) or X-ray photoelectron spectroscopy (XPS) is similarly useful to account for elastic-scattering effects on the signal intensities. We calculated these EALs for four elemental solids (Si, Cu, Ag, and Au) and for energies between 160 eV and 1.4 keV. The XPS calculations were made for two instrumental configurations while the AES calculations were made from the XPS formalism after "switching off" the XPS anisotropy. The EALs for quantitative determination of surface composition by AES and XPS were weak functions of emission angle for emission angles between 0 and 50°. The ratios of the average values of these EALs to the corresponding IMFPs could be fitted to a second-order function of the single-scattering albedo, a convenient measure of the strength of elastic-scattering effects. EALs for quantitative determination of surface composition by AES and XPS for other materials can be simply found from this relationship.

中文翻译:

通过俄歇电子能谱和 X 射线光电子能谱定量测定表面成分的有效衰减长度

有效衰减长度 (EAL) 通常用于代替非弹性平均自由程 (IMFP),以在描述来自平面基板的俄歇电子和光电子通过覆盖膜衰减时考虑弹性散射效应。通过俄歇电子能谱 (AES) 或 X 射线光电子能谱 (XPS) 定量测定表面成分的 EAL 同样适用于解释对信号强度的弹性散射效应。我们针对四种元素固体(Si、Cu、Ag 和 Au)以及 160 eV 和 1.4 keV 之间的能量计算了这些 EAL。XPS 计算是针对两种仪器配置进行的,而 AES 计算是在“关闭”XPS 各向异性后根据 XPS 形式进行的。通过 AES 和 XPS 定量测定表面成分的 EAL 是发射角在 0 到 50° 之间的弱函数。这些 EAL 的平均值与相应的 IMFP 的比率可以拟合到单散射反照率的二阶函数,这是弹性散射效应强度的方便度量。通过 AES 和 XPS 对其他材料的表面成分进行定量测定的 EAL 可以简单地从这种关系中找到。
更新日期:2017-07-01
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