The advent of new imaging technologies in Scanning Electron Microscopy (SEM) using low energy (0-2 keV) electrons has brought about new ways to study materials at the nanoscale. It also brings new challenges in terms of understanding electron transport at these energies. In addition, reduction in energy has brought new contrast mechanisms producing images that are sometimes difficult to interpret. This is increasing the push for simulation tools, in particular for low impact energies of electrons. The use of Monte Carlo calculations to simulate the transport of electrons in materials has been undertaken by many authors for several decades. However, inaccuracies associated with the Monte Carlo technique start to grow as the energy is reduced. This is not simply associated with inaccuracies in the knowledge of the scattering cross-sections, but is fundamental to the Monte Carlo technique itself. This is because effects due to the wave nature of the electron and the energy band structure of the target above the vacuum energy level become important and these are properties which are difficult to handle using the Monte Carlo method. In this review we briefly describe the new techniques of scanning low energy electron microscopy and then outline the problems and challenges of trying to understand and quantify the signals that are obtained. The effects of charging and spin polarised measurement are also briefly explored. SCANNING 38:802-818, 2016. © 2016 Wiley Periodicals, Inc.

中文翻译：

---

低电子能量下扫描电子显微镜中的模拟和测量

使用低能 (0-2 keV) 电子的扫描电子显微镜 (SEM) 中新成像技术的出现带来了在纳米尺度上研究材料的新方法。在理解这些能量下的电子传输方面，它也带来了新的挑战。此外，能量的减少带来了新的对比度机制，产生的图像有时难以解释。这增加了对模拟工具的推动，特别是对于电子的低冲击能。几十年来，许多作者一直使用蒙特卡罗计算来模拟材料中的电子传输。然而，随着能量的减少，与蒙特卡罗技术相关的不准确性开始增加。这不仅仅与散射截面知识的不准确有关，但它是蒙特卡罗技术本身的基础。这是因为电子的波动性和真空能级以上的靶的能带结构造成的影响变得重要，这些是使用蒙特卡罗方法难以处理的特性。在这篇综述中，我们简要描述了扫描低能电子显微镜的新技术，然后概述了试图理解和量化所获得信号的问题和挑战。还简要探讨了充电和自旋极化测量的影响。扫描 38:802-818, 2016. © 2016 Wiley Periodicals, Inc. 这是因为电子的波动性和真空能级以上的靶的能带结构造成的影响变得重要，这些是使用蒙特卡罗方法难以处理的特性。在这篇综述中，我们简要描述了扫描低能电子显微镜的新技术，然后概述了试图理解和量化所获得信号的问题和挑战。还简要探讨了充电和自旋极化测量的影响。扫描 38:802-818, 2016. © 2016 Wiley Periodicals, Inc. 这是因为电子的波动性和真空能级以上的靶的能带结构造成的影响变得重要，这些是使用蒙特卡罗方法难以处理的特性。在这篇综述中，我们简要描述了扫描低能电子显微镜的新技术，然后概述了试图理解和量化所获得信号的问题和挑战。还简要探讨了充电和自旋极化测量的影响。扫描 38:802-818, 2016. © 2016 Wiley Periodicals, Inc. 在这篇综述中，我们简要描述了扫描低能电子显微镜的新技术，然后概述了试图理解和量化所获得信号的问题和挑战。还简要探讨了充电和自旋极化测量的影响。扫描 38:802-818, 2016. © 2016 Wiley Periodicals, Inc. 在这篇综述中，我们简要描述了扫描低能电子显微镜的新技术，然后概述了试图理解和量化所获得信号的问题和挑战。还简要探讨了充电和自旋极化测量的影响。扫描 38:802-818, 2016. © 2016 Wiley Periodicals, Inc.