We present a new fabrication method to produce arrays of highly responsive polymer-metal core-shell magnetic microactuators. The core-shell fabrication method decouples the elastic and magnetic structural components such that the actuator response can be optimized by adjusting the core-shell geometry. Our microstructures are 10 μm long, 550 nm in diameter, and electrochemically fabricated in particle track-etched membranes, comprising a poly(dimethylsiloxane) core with a 100 nm Ni shell surrounding the upper 3-8 μm. The structures can achieve deflections of nearly 90° with moderate magnetic fields and are capable of driving fluid flow in a fluid 550 times more viscous than water.

中文翻译：

---

用于粘性和粘弹性流体的高响应核壳微致动器阵列

我们提出了一种新的制造方法来生产高响应聚合物-金属核-壳磁性微致动器阵列。核壳制造方法将弹性和磁性结构组件解耦，从而可以通过调整核壳几何形状来优化致动器响应。我们的微结构长 10 μm，直径 550 nm，采用电化学方法制造在粒子径迹蚀刻膜中，包括聚（二甲基硅氧烷）核和 100 nm Ni 壳围绕上部 3-8 μm。这些结构可以在中等磁场的情况下实现近 90° 的偏转，并且能够在比水的粘度高 550 倍的流体中驱动流体流动。