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Design Considerations for CMOS-Integrated Hall-Effect Magnetic Bead Detectors for Biosensor Applications
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2013-12-01 , DOI: 10.1109/jmems.2013.2259615
K Skucha 1 , S Gambini 2 , P Liu 3 , M Megens 1 , J Kim 4 , Be Boser 1
Affiliation  

We describe a design methodology for on-chip magnetic bead label detectors based on Hall-effect sensors. Signal errors caused by the label-binding process and other factors that limit the minimum detection area are quantified and adjusted to meet typical assay accuracy standards. The methodology is demonstrated by designing an 8192 element Hall sensor array, implemented in a commercial 0.18 μm CMOS process with single-mask postprocessing. The array can quantify a 1% surface coverage of 2.8 μm beads in 30 seconds with a coefficient of variation of 7.4%. This combination of accuracy and speed makes this technology a suitable detection platform for biological assays based on magnetic bead labels.

中文翻译:

用于生物传感器应用的 CMOS 集成霍尔效应磁珠探测器的设计注意事项

我们描述了一种基于霍尔效应传感器的片上磁珠标签检测器的设计方法。由标记结合过程和其他限制最小检测区域的因素引起的信号错误被量化和调整,以满足典型的检测准确度标准。该方法通过设计一个 8192 元件霍尔传感器阵列来演示,该阵列在商用 0.18 μm CMOS 工艺中实现,并带有单掩模后处理。该阵列可以在 30 秒内量化 2.8 μm 珠子的 1% 表面覆盖率,变异系数为 7.4%。这种准确性和速度的结合使该技术成为基于磁珠标记的生物测定的合适检测平台。
更新日期:2013-12-01
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