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Dual-source E-Beam Evaporation
发布时间:2019-10-14

Electron-Beam Evaporation (Angstron Engineering AMOD)

  • Dual electron beams for co-evaporation: 2 Telemark 6 ╳ 7cc electron beam sources
  • Reactive gas: O2, N2...
  • Substrate size: 6 inches, temperature: <500 °C
  • Metal: Al, Si, Ti, Cr, Fe, Co, Ni, Cu, Nb, Ag, Ta, W, Au...
  • Non-metal: Al2O3, SiO2, TiO2, Fe2O3, NiO, Ga2O3, SrTiO3, ZrO2, Nb2O5, In2O3, SnO2, BaO, BaF2, Ta2O5, La2O3...