Abstract Organic P(VDF-TrFE) 70/30 copolymer thin films were fabricated on Pt/Ti/SiO2/Si(1 1 1) and ITO/glass substrates at 140 °C using a spin coater. Both P(VDF-TrFE) thin films exhibited ferroelectric β-phase crystallinity, as confirmed by X-ray diffraction analysis. The polarization–electric hysteresis loops of the P(VDF-TrFE) thin films on the Pt and indium-tin-oxide substrates showed high remnant polarizations of 15.5 and 11.8 μC/cm2, respectively. Atomic force microscopy characterization showed rod-like features of the P(VDF-TrFE) thin films on both substrates, where larger rod diameters were observed on the Pt substrate compared to those fabricated on the ITO substrate. Piezoelectric force microscopy measurements further confirmed the superior piezoelectric and ferroelectric properties of the P(VDF-TrFE) thin films on the Pt substrate compared to those on the ITO substrate, which arose from the increased diameter of the rod-like features.

中文翻译：

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Pt和ITO衬底上P(VDF-TrFE)薄膜的压电和铁电特性

摘要 使用旋涂机在 140 °C 下在 Pt/Ti/SiO2/Si(1 1 1) 和 ITO/玻璃基板上制备有机 P(VDF-TrFE) 70/30 共聚物薄膜。X 射线衍射分析证实，两种 P(VDF-TrFE) 薄膜都表现出铁电 β 相结晶度。Pt 和氧化铟锡衬底上的 P(VDF-TrFE) 薄膜的极化-电滞回线分别显示出 15.5 和 11.8 μC/cm2 的高残余极化。原子力显微镜表征显示 P(VDF-TrFE) 薄膜在两种基板上具有棒状特征，与在 ITO 基板上制造的相比，在 Pt 基板上观察到更大的棒直径。