Gravimetric, direct-current electrical, and electrical impedance sensing modes were used to measure response of high surface area 2D Ti₃C₂ MXene film to water vapor pressures spanning 3 orders of magnitude (20 mTorr–20 Torr). The Ti₃C₂ film exhibited reproducible reversible response in 0.1%–95% relative humidity (RH) range with a detection limit of <20 mTorr H₂O partial pressure (<0.1% RH). DC electrical current-based sensing with 3 mV operating voltage and 0.8 pW power consumption was demonstrated. The highest normalized sensitivity was shown for gravimetric sensing modalities which scale with the overtone number, reaching highest sensitivity of about 12 Hz/% RH at the 9^th crystal overtone (45 MHz oscillation).

中文翻译：

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采用Ti ₃ C ₂膜的多模式，超灵敏，宽范围的湿度感测† ‡

重力，直流电和电阻抗感应模式用于测量高表面积2D Ti ₃ C ₂ MXene膜对跨越3个数量级（20 mTorr–20 Torr）的水蒸气压力的响应。Ti ₃ C ₂膜在0.1％至95％相对湿度（RH）范围内表现出可再现的可逆响应，检测极限为<20 mTorr H ₂ O分压（<0.1％RH）。演示了基于直流电流的感应，其工作电压为3 mV，功耗为0.8 pW。最高归一化敏感性示出了用于重力传感方式的缩放与泛音数，在9达到约12赫兹/％RH的灵敏度最高^次 晶体泛音（45 MHz振荡）。