Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 μm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.

中文翻译：

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两个高反射率SiN膜的集成光机阵列。

多元件腔体光力学构成了一种观察机械谐振器新颖效果的方向。一些令人兴奋的想法包括超辐射，增加的光机械耦合以及不同机械模式之间的量子效应等。迄今为止，实现这些实验非常困难，因为由于每个元件都需要高反射率，因此需要将这些元件相对于彼此进行非常精确的定位。在这里，我们克服了这一挑战，并提出了在单个芯片中两个高反射率机械谐振器的单片阵列的制造。我们表征了这些200μm长的Fabry-Pérot干涉仪的光谱和损耗，可测量高达220的精细值。此外，我们观察到，与单膜情况相比，腔场与机械质心模式之间的耦合速率有所提高。预计与这些器件的耦合将进一步增强，有可能达到单光子强耦合状态，从而为这些集成结构提供了未来多模量子实验的令人兴奋的前景。