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Thermal Effects and Photoluminescence of Zirconium Doped Hybrid Sol Gel Waveguide
Materials Letters ( IF 3 ) Pub Date : 2019-01-01 , DOI: 10.1016/j.matlet.2018.09.097 Ha-Sung Kong , Kwang-Sun Kang
Materials Letters ( IF 3 ) Pub Date : 2019-01-01 , DOI: 10.1016/j.matlet.2018.09.097 Ha-Sung Kong , Kwang-Sun Kang
Abstract Multifactor lithographic process conditions have been achieved in order to fabricate 3-D single mode waveguide. One of the key factors is the heating (preheating and post-baking) process. Good waveguides were formed with 30 min of pre-heating at 100 °C. Sol gel waveguides have low light loss (0.16 dB/cm), which was achieved with an aged sol gel slab waveguide. By carefully controlling the index difference between cladding and core, light was easily launched into 4-inch lengths of single mode 3-D ridge waveguides. As the heating time increases, the luminescence intensities increase until 65 h and ceased further post-baking process at 110 °C. The thermally produced chromophore luminescence intensity was reduced about 10% after deep UV exposure for 12 min and no further reduction was observed.
中文翻译:
锆掺杂混合溶胶凝胶波导的热效应和光致发光
摘要 为了制造 3-D 单模波导,已经实现了多因素光刻工艺条件。关键因素之一是加热(预热和后烘烤)过程。在 100°C 下预热 30 分钟即可形成良好的波导。溶胶凝胶波导具有低光损耗 (0.16 dB/cm),这是通过老化的溶胶凝胶平板波导实现的。通过仔细控制包层和纤芯之间的折射率差异,光可以轻松地发射到 4 英寸长的单模 3-D 脊形波导中。随着加热时间的增加,发光强度增加直到 65 小时,并在 110 °C 下停止进一步的后烘烤过程。在深紫外线照射 12 分钟后,热产生的发色团发光强度降低了约 10%,并且没有观察到进一步的降低。
更新日期:2019-01-01
中文翻译:
锆掺杂混合溶胶凝胶波导的热效应和光致发光
摘要 为了制造 3-D 单模波导,已经实现了多因素光刻工艺条件。关键因素之一是加热(预热和后烘烤)过程。在 100°C 下预热 30 分钟即可形成良好的波导。溶胶凝胶波导具有低光损耗 (0.16 dB/cm),这是通过老化的溶胶凝胶平板波导实现的。通过仔细控制包层和纤芯之间的折射率差异,光可以轻松地发射到 4 英寸长的单模 3-D 脊形波导中。随着加热时间的增加,发光强度增加直到 65 小时,并在 110 °C 下停止进一步的后烘烤过程。在深紫外线照射 12 分钟后,热产生的发色团发光强度降低了约 10%,并且没有观察到进一步的降低。