Electron beam lithography (EBL) is of major importance for ultraminiaturized biohybrid system fabrication, as it allows combining biomolecular patterning and mechanical structure definition on the nanoscale. Existing methods are limited by multistep biomolecule immobilization procedures, harsh processing conditions that are harmful to sensitive biomolecules, or the structural properties of the resulting protein monolayers or hydrogel-based resists. This work introduces a thiol–ene EBL resist with chemically reactive thiol groups on its native surface that allow the direct and selective “click” immobilization of biomolecules under benign processing conditions. We constructed EBL structured features of size down to 20 nm, and direct functionalized the nanostructures with a sandwich of biotin and streptavidin. The facile combination of polymer nanostructuring with biomolecule immobilization enables mechanically robust biohybrid components of interest for nanoscale biomedical, electronic, photonic, and robotic applications.

中文翻译：

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硫酚抗性的电子束纳米结构和直接点击生物功能化

电子束光刻（EBL）对于超小型化生物混合系统的制造至关重要，因为它可以将生物分子图案化和机械结构定义相结合。现有方法受到多步生物分子固定程序，对敏感生物分子有害的恶劣加工条件或所得蛋白质单层或基于水凝胶的抗蚀剂的结构特性的限制。这项工作引入了硫醇-烯EBL抗蚀剂，其天然表面具有化学反应性硫醇基团，可以在良性加工条件下直接和选择性地“点击”固定生物分子。我们构建了尺寸低至20 nm的EBL结构化特征，并用生物素和抗生蛋白链菌素的三明治直接功能化了纳米结构。