We report on the fabrication of crystalline lithium niobate microresonators with quality factors above ${10}^7$, as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second-harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

中文翻译：

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品质因数大于10 ^7的铌酸锂微盘谐振器

我们报告了品质因数在以上的结晶铌酸锂微谐振器的制造 ${10}^7$，在770 nm波长附近测得。我们的技术依靠飞秒激光微机械加工将绝缘体上的铌酸锂（LNOI）上涂覆的掩模图案化成微型磁盘，然后进行化学机械抛光工艺，以将盘形图案转移到LNOI上。在制造的微盘中已经证明了包括二次谐波产生和拉曼散射的非线性过程。