Growth of Pb(Mg_1/3Nb_2/3)O₃–33PbTiO₃ thin films by pulsed-laser deposition directly on non-conductive SrTiO₃ substrates for d₃₃-mode energy harvesters (EHs) was studied, as they offer a higher figure-of-merit than d₃₁-mode EHs. It was found that a high defect density, present in the film grown at 0.13 mbar, is manifested in the form of splitting of the (00l) peaks in X-ray diffraction, which was avoided by raising the process pressure to 0.27 mbar. Nevertheless, both films grow in a combined 2D and 3D manner, and form out-of-phase boundaries (OPBs) with a PbO rock-salt structure between the as-grown islands. It was found that the overall composition of the sample with optimized structural and functional properties was Pb_1.07Mg_0.19Nb_0.44Ti_0.32O₃, which is close to stoichiometric. The surplus of Pb is compensated by the formation of OPBs and Mg deficit maintains macroscopic electroneutrality. In-plane and out-of-plane relative permittivities of 1900 and 980, respectively, imply macroscopic out-of-plane polarization.

研究了直接在非导电SrTiO ₃衬底上用脉冲激光沉积Pd（Mg _1/3 Nb _2/3）O ₃ –33PbTiO ₃薄膜生长的d _33型能量收集器（EHs），因为它们提供了品质因数比d ₃₁模式EH高。已发现以0.13毫巴生长的薄膜中存在高缺陷密度，其形式为（00 l）在X射线衍射中达到峰值，这可以通过将过程压力提高到0.27 mbar来避免。然而，两种膜都以2D和3D结合的方式生长，并在所生长的岛之间形成具有PbO岩盐结构的异相边界（OPB）。发现具有优化的结构和功能性质的样品的总体组成为Pb _1.07 Mg _0.19 Nb _0.44 Ti _0.32 O ₃，这接近化学计量。Pb的过剩可以通过OPB的形成得到补偿，而Mg的缺乏则可以保持宏观的电子中性。面内和面外相对介电常数分别为1900和980，表示宏观面外极化。