Abstract Ti1-xSixN coating is a promising candidate for wear resistant applications due to their super-hardness and high thermal stability. Here, we explored the structure, mechanical properties and thermal stability of Ti1-xSixN (x = 0, 0.13, 0.17 and 0.22) coatings deposited by cathodic arc evaporation. Monolithically grown Si-containing Ti1-xSixN coatings, which are Si-solution in TiN for x = 0.13 and 0.17, reveal a high hardness of 39.4 ± 0.67 and 40.6 ± 0.72 GPa, respectively. Then Ti1-xSixN transforms into a nanocomposite structure consisting of cubic Ti(Si)N nanocrystallite enveloped by the amorphous SiNx tissue phase for x = 0.22, which exhibits a high hardness of 40.0 ± 0.6 GPa. However, increasing of Si content leads to a significant increase in compressive stress from −0.63 GPa for x = 0 to −3.78 GPa for x = 0.13 to −4.54 GPa for x = 0.17 to −5.51 GPa for x = 0.22. The hardness of Ti1-xSixN coatings can be maintained up to ~ 1000 °C due to the suppressed grain growth, and then decreases for further elevated annealing temperature, whereas the TiN coating exhibits a continuous drop in hardness towards its intrinsic value of ~ 21.3 GPa.

中文翻译：

---

Ti 1-x Si x N涂层的结构、机械性能和热稳定性

摘要 Ti1-xSixN 涂层由于其超硬和高热稳定性而成为耐磨应用的有希望的候选者。在这里，我们探索了通过阴极电弧蒸发沉积的 Ti1-xSixN（x = 0、0.13、0.17 和 0.22）涂层的结构、机械性能和热稳定性。单片生长的含硅 Ti1-xSixN 涂层，即 x = 0.13 和 0.17 的 TiN 中的 Si 溶液，分别显示出 39.4 ± 0.67 和 40.6 ± 0.72 GPa 的高硬度。然后 Ti1-xSixN 转变为由立方 Ti(Si)N 纳米微晶组成的纳米复合结构，由无定形 SiNx 组织相包裹，x = 0.22，其硬度高达 40.0 ± 0.6 GPa。然而，Si 含量的增加导致压缩应力从 x = 0 的 -0.63 GPa 显着增加到 x = 0.13 的 -3.78 GPa 到 x = 0 的 -4.54 GPa。x = 0.22 时为 17 至 -5.51 GPa。由于晶粒生长受到抑制，Ti1-xSixN 涂层的硬度可保持高达 ~ 1000 °C，然后随着退火温度的进一步升高而降低，而 TiN 涂层的硬度持续下降至其固有值 ~ 21.3 GPa .