High-quality ($Q$)-factor silicon microdisks are promising platforms for revolutionizing bio-sensing, medical diagnoses, and frequency combs. Nevertheless, their practical applications are hindered by the regular waveguide–resonator coupling configuration, which relies on sophisticated and high-cost nanofabrication. Here, we demonstrate a simple, cost-effective, and counterintuitive mechanism to couple light into a high-$Q$ silicon microdisk. In contrast to the evanescent coupling, the incident light is injected into silicon microdisks through the waveguides directly connected to them. The end-fire injection coefficients and $Q$ factors of waveguide-connected microdisks are around 57% and $2\times {10}^5–7\times {10}^5$, comparable to conventional microdisks. Importantly, the end-fire injection configuration is quite robust to fabrication deviations and can be simply realized without using electron-beam lithography. Meanwhile, their applications in monitoring nanoparticles and tiny ambient changes have also been explored. This research will route a new way to on-chip biosensors and integrated photonic circuits.

中文翻译：

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端射光向高Q硅微盘中注入光

高质量 （$问$因子硅微盘是有望革新生物传感，医学诊断和频率梳的平台。尽管如此，常规的波导-谐振器耦合配置阻碍了它们的实际应用，而常规的波导-谐振器耦合配置依赖于复杂而昂贵的纳米加工。在这里，我们展示了一种简单，经济高效且违反直觉的机制，可以将光耦合到高强度的$问$硅微盘。与the逝耦合相反，入射光通过直接连接到硅微盘的波导注入硅微盘。端火喷射系数和$问$ 波导连接的微型磁盘的系数约为57％，并且 $\mathrm{2个}\times {10}^5–7\times {10}^5$，可与传统微盘媲美。重要的是，端射注入配置对制造偏差相当鲁棒，并且可以在不使用电子束光刻的情况下简单地实现。同时，还研究了它们在监测纳米颗粒和微小的环境变化中的应用。这项研究将为片上生物传感器和集成光子电路提供一条新途径。