Abstract Rutile TiO 2 nanorod arrays (NRAs) are applicable in various prospective technologies. Hydrothermal methods present a simple technique to fabricate such NRAs. In this report, we present the fabrication of seed layers for the hydrothermal growth of rutile TiO 2 nanorods via sputter deposition, electron-beam evaporation, and sol-gel method and study the influence of each on the growth behavior. To satisfy the requirements of numerous applications, p-type silicon, platinum, levitating carbon membranes, a template made of polystyrene spheres, and commercial fluorine tin oxide (FTO) were employed as substrates. We document the structural properties of the TiO 2 seed layers and describe the relationship between the characteristics of the seed crystals, the growth evolution, and the appearance of as-grown nanorods. Various growth stages of rutile TiO 2 nanorods are compared depending on whether they are grown on polycrystalline TiO 2 or FTO seed layers. In both cases, a homogenous TiO 2 bottom layer is formed at the seed layer/substrate interface, which is essential for electronic applications such as hybrid solar cells. Detached NRAs illustrate the effect of rutile FTO and TiO 2 on the porosity of this bottom layer. Further details about the formation process of this layer are obtained from the growth on confined seed layers fabricated by electron-beam lithography.

中文翻译：

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基材和金红石种子层对水热生长金红石 TiO 2 纳米棒阵列组装的影响

摘要 金红石TiO 2 纳米棒阵列（NRA）适用于各种前瞻性技术。水热法提供了一种制造此类 NRA 的简单技术。在本报告中，我们介绍了通过溅射沉积、电子束蒸发和溶胶-凝胶法制备用于金红石 TiO 2 纳米棒水热生长的种子层，并研究了每种方法对生长行为的影响。为了满足众多应用的要求，采用 p 型硅、铂、悬浮碳膜、由聚苯乙烯球制成的模板和商用氟锡氧化物 (FTO) 作为基材。我们记录了 TiO 2 种子层的结构特性，并描述了种子晶体的特性、生长演变和生长的纳米棒外观之间的关系。金红石 TiO 2 纳米棒的不同生长阶段根据它们是生长在多晶 TiO 2 还是 FTO 种子层上进行比较。在这两种情况下，均质 TiO 2 底层形成于种子层/基板界面，这对于混合太阳能电池等电子应用至关重要。分离的 NRA 说明了金红石 FTO 和 TiO 2 对该底层孔隙率的影响。从通过电子束光刻制造的受限种子层上的生长获得有关该层形成过程的更多细节。分离的 NRA 说明了金红石 FTO 和 TiO 2 对该底层孔隙率的影响。从通过电子束光刻制造的受限种子层上的生长获得有关该层形成过程的更多细节。分离的 NRA 说明了金红石 FTO 和 TiO 2 对该底层孔隙率的影响。从通过电子束光刻制造的受限种子层上的生长获得有关该层形成过程的更多细节。