Perovskite solar cells with TiO₂ electron transport layers exhibit power conversion efficiency (PCE) as high as 22.7% in single cells. However, the preparation process of the TiO₂ layer is adopted by an unscalable method or requires high-temperature sintering, which precludes its potential use for mass production of flexible devices. In this study, a scalable low-temperature soft-cover-assisted hydrolysis (SAH) method is presented, where the precursor solution is sandwiched between a soft cover and preheated substrate to form a closed hydrolysis environment. Compact homogeneous TiO₂ films with a needle-like structure were obtained after the hydrolysis of a TiCl₄ aqueous solution. Moreover, by careful optimization of the TiO₂ fabrication conditions, a high PCE of 14.01% could be achieved for a solar module (4 × 4 cm²) prepared using the SAH method. This method provides a novel approach for the efficient scale-up of the low-temperature TiO₂ film growth for industrial applications.

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具有TiO ₂电子传输层的钙钛矿太阳能电池在单个电池中的功率转换效率（PCE）高达22.7％。然而，TiO ₂层的制备方法采用不可缩放的方法或需要高温烧结，这排除了其在大规模生产柔性器件中的潜在用途。在这项研究中，提出了一种可扩展的低温软覆盖辅助水解（SAH）方法，其中将前体溶液夹在软覆盖层和预热的基材之间，以形成封闭的水解环境。TiCl ₄水溶液水解后，得到具有针状结构的致密均匀的TiO ₂薄膜。此外，通过精心优化TiO_在2个制造条件下，使用SAH方法制备的太阳能模块（4×4 cm ²）可以实现14.01％的高PCE 。该方法为工业应用中的低温TiO ₂薄膜生长的有效放大提供了一种新颖的方法。

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