Gas nanosensors, comprised of arrays of nanoelectrodes with finger-widths of ∼100 nm developed by electron beam lithography and aerosol assisted chemical vapor deposited non-functionalized and Pt-functionalized tungsten oxide nanowires (<100 nm) subsequently integrated across the pairs of electrodes via the dielectrophoresis method, are developed in this work. The functionality of these devices is validated towards various concentrations of NO₂ and C₂H₅OH. The results demonstrate reproducible and consistent responses with better sensitivity and partial selectivity for the non-functionalized systems to NO₂, as opposed to the Pt-functionalized systems, which display better sensing properties towards C₂H₅OH with a loss of response to NO₂. These results are explained on the basis of the additional chemical and electronic interactions at the Pt/tungsten oxide interface, which increase the pre-adsorption of oxygen species and make the functionalized surface rather more sensitive to C₂H₅OH than to NO₂, in contrast to the non-functionalized surface.

中文翻译：

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选择性布置的基于单线的纳米传感器阵列系统，用于气体监测†

气体纳米传感器由通过电子束光刻和气溶胶辅助化学气相沉积的未官能化和Pt官能化的氧化钨纳米线（<100 nm）形成的手指宽度约为100 nm的纳米电极阵列组成，随后通过介电电泳法在这项工作中得到了发展。这些设备的功能已针对各种浓度的NO ₂和C ₂ H ₅ OH进行了验证。结果表明，与非官能化系统对NO _2的灵敏度和部分选择性相比，Pt官能化系统具有更好的灵敏度和可重现性，并且响应一致，而Pt官能化系统对C的感测特性更好。₂ H ₅ OH，对NO ₂的响应丧失。这些结果是根据Pt /钨氧化物界面上的其他化学和电子相互作用进行解释的，这些相互作用增加了氧的预吸附作用，并使官能化表面对C ₂ H ₅ OH的敏感性比对NO _2的敏感性高，与未功能化的表面相反。