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Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
RSC Advances ( IF 3.9 ) Pub Date : 2018-04-20 00:00:00 , DOI: 10.1039/c8ra90030b Cleverson Alves da Silva Moura 1 , Guilherme Kretzmann Belmonte 1 , Pulikanti Guruprasad Reddy 2 , Kenneth E Gonsalves 2 , Daniel Eduardo Weibel 1
RSC Advances ( IF 3.9 ) Pub Date : 2018-04-20 00:00:00 , DOI: 10.1039/c8ra90030b Cleverson Alves da Silva Moura 1 , Guilherme Kretzmann Belmonte 1 , Pulikanti Guruprasad Reddy 2 , Kenneth E Gonsalves 2 , Daniel Eduardo Weibel 1
Affiliation
Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.
中文翻译：
更正：含锑作为吸收增强剂的混合非化学放大抗蚀剂的 EUV 光碎裂研究
Cleverson Alves da Silva Moura等人对“含有锑作为吸收增强剂的混合非化学放大抗蚀剂的 EUV 光破碎研究”的校正。, RSC 进阶。, 2018, 8 , 10930–10938。
更新日期：2018-04-20
中文翻译：
更正：含锑作为吸收增强剂的混合非化学放大抗蚀剂的 EUV 光碎裂研究
Cleverson Alves da Silva Moura等人对“含有锑作为吸收增强剂的混合非化学放大抗蚀剂的 EUV 光破碎研究”的校正。, RSC 进阶。, 2018, 8 , 10930–10938。
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