Carbon nanotube (CNT) has been considered as an ideal channel material for building highly sensitive gas sensors. However, the reported H₂ sensors based on CNT always suffered from the low sensitivity or low production. We developed the technology to massively fabricate ultra-highly sensitive H₂ sensors based on solution derived CNT network through comprehensive optimization of the CNT material, device structure, and fabrication process. In the H₂ sensors, high semiconducting purity solution-derived CNT film sorted by poly[9-(1-octylonoyl)-9H-carbazole-2,7-diyl](PCz) is used as the main channel, which is decorated with Pd nanoparticles as functionalization for capturing H₂. Meanwhile, Ti contacts are used to form a Schottky barrier for enhancing transferred charge-induced resistance change, and then a response of resistance change by 3 orders of magnitude is achieved at room temperature under the concentration of ∼311 ppm with a very fast response time of approximately 7 s and a detection limit of 890 ppb, which is the highest response to date for CNT H₂ sensors and the very first time to show the sub-ppm detection for H₂ at room temperature. Furthermore, the detection limit concentration can be improved to 89 ppb at 100 °C. The batch fabrication of CNT film H₂ sensors with ultra-high sensitivity and high uniformity is ready to promote CNT devices to application for the first time in some specialized field.

中文翻译：

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批量制造具有低于ppm检测限的超灵敏碳纳米管氢传感器

碳纳米管（CNT）被认为是构建高灵敏度气体传感器的理想通道材料。然而，报道的基于CNT的H ₂传感器总是遭受低灵敏度或低产量的困扰。我们通过全面优化CNT材料，器件结构和制造工艺，开发了基于溶液衍生的CNT网络大规模制造超高灵敏度H ₂传感器的技术。在H ₂传感器中，以聚[9-（1-辛烯酰基）-9 H-咔唑-2,7-二基]（PCz）分选的高半导体纯度溶液碳纳米管薄膜为主要通道，对其进行装饰。钯纳米颗粒作为捕获H _{2的功能化}。同时，Ti触点用于形成肖特基势垒，以增强转移的电荷诱导的电阻变化，然后在室温〜311 ppm的浓度下，以非常快的响应时间在室温下实现了3个数量级的电阻变化响应。大约7 s的检测时间和890 ppb的检测极限，这是迄今为止对CNT H ₂传感器的最高响应，也是首次显示室温下对H ₂的亚ppm检测。此外，在100°C时，检测极限浓度可以提高到89 ppb。具有超高灵敏度和高均匀度的CNT膜H ₂传感器的批量生产准备好促进CNT器件在某些专业领域中的首次应用。