当前位置: X-MOL 学术Organometallics › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Asymmetrically Substituted Tetrahedral Cobalt NHC Complexes and Their Use as ALD as well as Low-Temperature CVD Precursors
Organometallics ( IF 2.8 ) Pub Date : 2018-03-16 00:00:00 , DOI: 10.1021/acs.organomet.8b00060
Katharina Lubitz 1 , Varun Sharma 2 , Shashank Shukla 2 , Johannes H. J. Berthel 1 , Heidi Schneider 1 , Christoph Hoßbach 2 , Udo Radius 1
Affiliation  

The synthesis of novel asymmetrically substituted cobalt complexes of the type [Co(CO)(NO)(NHC)(PR3)] (NHC = iPr2Im, PR3 = PMe3 (1), PEt3(2), PHiPr2 (3); PR3 = PMe3;, NHC = Me2ImMe (4), MeiPrIm (5), MetBuIm (6), iPr2ImMe (7); R2Im = 1,3-dialkylimidazolin-2-ylidene) is reported. These complexes are stabilized by N-heterocyclic carbene (NHC), phosphine, carbonyl, and nitrosyl ligands and have been synthesized from the reaction of a NHC-substituted precursor of the type [Co(CO)2(NO)(NHC)] and the corresponding phosphine. The synthesis of [Co(CO)(NO)(MetBuIm)(PMe3)] (6) and [Co(CO)(NO)(iPr2ImMe)(PMe3)] (7) proceeds in a thermal reaction even at room temperature by quantitative replacement of one carbonyl with a phosphine ligand. All of the other complexes were synthesized using photochemical conditions. Complexes 16 have been characterized by elemental analysis, IR spectroscopy, and multinuclear NMR spectroscopy and in some cases by X-ray crystallography. All complexes are volatile, are stable upon sublimation, and decompose readily in a stepwise manner at elevated temperature. The complex [Co(CO)(NO)(iPr2Im)(PMe3)] (1) as well as cobalt complexes that were reported earlier, i.e. [Co(CO)(NO)(iPr2Im)2], [Co(CO)(NO)(MetBuIm)2], and [Co(CO)2(NO)(iPr2Im)], are evaluated and have been successfully applied in the deposition of cobalt-based thin films.

中文翻译:

非对称取代的四面体钴NHC配合物及其作为ALD和低温CVD前体的用途

新型[Co(CO)(NO)(NHC)(PR 3)](NHC = i Pr 2 Im,PR 3 = PMe 31),PEt 32), PH23); PR 3 = PME 3 ;,NHC =我24)中,MePRIM(5)中,MeBuIm(6),27); 据报道R 2 Im = 1,3-二烷基咪唑啉-2-亚烷基。这些配合物由N-杂环卡宾(NHC),膦,羰基和亚硝酰基配体稳定,并且是由[Co(CO)2(NO)(NHC)]型NHC取代的前体的反应合成的,相应的膦。[Co(CO)(NO)(Me t BuIm)(PMe 3)](6)和[Co(CO)(NO)(i Pr 2 Im Me)(PMe 3)](7)的合成)甚至通过在室温下通过用膦配体定量取代一种羰基来进行热反应。使用光化学条件合成所有其他配合物。配合物1 - 6已经通过元素分析,红外光谱,和多核NMR光谱和在一些情况下通过X射线晶体学。所有的配合物都是挥发性的,在升华后是稳定的,并且在升高的温度下容易以逐步的方式分解。络合物[Co(CO)(NO)(i Pr 2 Im)(PMe 3)](1)以及先前报道的钴络合物,即[Co(CO)(NO)(i Pr 2 Im)2],[Co(CO)(NO)(Me t BuIm)2 ]和[Co(CO)2(NO)(i Pr 2 Im)]进行了评估,并已成功应用于钴基沉积薄膜。
更新日期:2018-03-17
down
wechat
bug