Abstract A systematic investigation is performed to determine the effects of the concentration of silver on metal assisted chemical etching (MaCE) for nanostructure formation mechanisms on silicon as well as their resultant optical properties. Silver nitrate concentrations of 8 mM, 4 mM, 3 mM and 2 mM with hydrogen fluoride were used for the preparation of p-type silicon nanostructures. Experimentally, it is observed that when the catalysis molarity concentration is decreased in the etching processes, it resulted in nanostructures ranging from 140 to 60 nm, respectively over the concentrations investigated. A detailed analysis of the optical properties and structure provided insight into the physics of their formation. In addition, the results show the silicon nanostructures formed black silicon where in the visible region of the spectrum the reflectance dropped by an order of magnitude. The results indicate MaCE is a promising approach to the manufacturing of antireflection coatings on black silicon-based solar photovoltaic cells. MaCE is a simple and scalable approach to enhance the optical absorption of silicon and improve the overall efficiency of the solar cell without adding significantly to the complexity, capital expenditure or cost of production.

中文翻译：

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银催化剂浓度对金属辅助硅化学蚀刻的影响

摘要 进行了一项系统研究，以确定银浓度对金属辅助化学蚀刻 (MaCE) 的影响，用于在硅上形成纳米结构的机制及其产生的光学特性。8 mM、4 mM、3 mM 和 2 mM 的硝酸银浓度与氟化氢一起用于制备 p 型硅纳米结构。实验上，观察到当在蚀刻过程中降低催化摩尔浓度时，会导致纳米结构的范围分别为 140 到 60 nm，超过所研究的浓度。对光学特性和结构的详细分析提供了对其形成物理的深入了解。此外，结果表明，硅纳米结构形成了黑硅，其中在光谱的可见区域，反射率下降了一个数量级。结果表明，MaCE 是一种在黑硅基太阳能光伏电池上制造抗反射涂层的有前途的方法。MaCE 是一种简单且可扩展的方法，可在不显着增加复杂性、资本支出或生产成本的情况下，增强硅的光吸收并提高太阳能电池的整体效率。