AbstractPhotosensitive engineering plastics as typified by photosensitive polyimides are mainly used in the electronics industry to form fine patterns for uses in which they will not be removed for a long time. However, to impart photosensitivity, it is necessary to introduce a functional group into a polymer or to use a precursor polymer, which hinders further applications of these polymers. We have developed reaction development patterning (RDP) as a method of forming a fine pattern by promoting the reaction between carboxylic acid derivatives in a polymer chain and nucleophiles in a developer selectively at the exposed or unexposed area. Since engineering plastics such as polyimide and polycarbonate inherently have carboxylic acid derivative groups in their main chain, RDP can easily impart photosensitivity to a wide range of polymers, including commercially available engineering plastics. By using RDP, it is possible to form both positive- and negative-tone patterns from the same polymer. In this review, I will describe recent developments in the study of photosensitive engineering plastics by focusing on RDP.This review focuses on recent developments in the study of photosensitive engineering plastics based on reaction development patterning (RDP). RDP is a method of forming a fine pattern by promoting the reaction between carboxylic acid derivatives in a polymer chain and nucleophiles in a developer selectively at the exposed or unexposed area. Since engineering plastics such as polyimide and polycarbonate inherently have carboxylic acid derivative groups, RDP can impart photosensitivity to various polymers, including commercially available engineering plastics. Both positive- and negative-tone patterns can be formed by using RDP.

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基于反应显影图案的光敏工程塑料

摘要 以光敏聚酰亚胺为代表的光敏工程塑料主要用于电子工业，形成精细图案，长期不会脱落。然而，为了赋予光敏性，需要在聚合物中引入官能团或使用前体聚合物，这阻碍了这些聚合物的进一步应用。我们开发了反应显影图案化 (RDP) 作为一种通过在曝光或未曝光区域选择性地促进聚合物链中的羧酸衍生物与显影剂中的亲核试剂之间的反应来形成精细图案的方法。由于聚酰亚胺和聚碳酸酯等工程塑料在其主链中固有地具有羧酸衍生物基团，因此RDP可以轻松地将光敏性赋予范围广泛的聚合物，包括市售的工程塑料。通过使用 RDP，可以从相同的聚合物形成正色调和负色调图案。在这篇综述中，我将通过关注 RDP 来描述光敏工程塑料研究的最新进展。这篇综述重点介绍基于反应显影图案 (RDP) 的光敏工程塑料研究的最新进展。RDP是一种通过在曝光或未曝光区域选择性地促进聚合物链中的羧酸衍生物与显影剂中的亲核试剂之间的反应来形成精细图案的方法。由于聚酰亚胺和聚碳酸酯等工程塑料固有地具有羧酸衍生物基团，因此 RDP 可以赋予各种聚合物光敏性，包括市售的工程塑料。