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Site-Specific Growth and in Situ Integration of Different Nanowire Material Networks on a Single Chip: Toward a Nanowire-Based Electronic Nose for Gas Detection
ACS Sensors ( IF 8.9 ) Pub Date : 2018-02-27 00:00:00 , DOI: 10.1021/acssensors.8b00073
Lukas Hrachowina 1 , Guillem Domènech-Gil , Antonio Pardo , Michael S. Seifner 1 , Isabel Gràcia 2 , Carles Cané 2 , Albert Romano-Rodríguez , Sven Barth 1
Affiliation  

A new method for the site-selective synthesis of nanowires has been developed to enable material growth with defined morphology and, at the same time, different composition on the same chip surface. The chemical vapor deposition approach for the growth of these nanowire-based resistive devices using micromembranes can be easily modified and represents a simple, adjustable fabrication process for the direct integration of nanowire meshes in multifunctional devices. This proof-of-concept study includes the deposition of SnO2, WO3, and Ge nanowires on the same chip. The individual resistors exhibit adequate gas sensing responses toward changing gas concentrations of CO, NO2, and humidity diluted in synthetic air. The data have been processed by principal component analysis with cluster responses that can be easily separated, and thus, the devices described herein are in principle suitable for environmental monitoring.

中文翻译:

在单个芯片上的特定位置增长和不同纳米线材料网络的原位集成:朝着基于纳米线的电子鼻进行气体检测

已经开发了用于纳米线的位点选择性合成的新方法,以使材料能够以定义的形态生长,并且同时在同一芯片表面上具有不同的成分。使用微膜生长这些基于纳米线的电阻器件的化学气相沉积方法可以轻松修改,并且代表了一种简单,可调节的制造工艺,用于将纳米线网格直接集成到多功能器件中。该概念验证研究包括在同一芯片上沉积SnO 2,WO 3和Ge纳米线。各个电阻器对变化的CO,NO 2气体浓度表现出足够的气体感应响应,湿度在合成空气中稀释。数据已通过具有易于分离的群集响应的主成分分析进行了处理,因此,本文所述的设备原则上适用于环境监控。
更新日期:2018-02-27
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