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Induction-heating MOCVD reactor with significantly improved heating efficiency and reduced harmful magnetic coupling
Journal of Crystal Growth ( IF 1.8 ) Pub Date : 2018-04-01 , DOI: 10.1016/j.jcrysgro.2018.02.031
Kuang-Hui Li , Hamad S. Alotaibi , Haiding Sun , Ronghui Lin , Wenzhe Guo , Carlos G. Torres-Castanedo , Kaikai Liu , Sergio Valdes-Galán , Xiaohang Li

Because of competition and the resulting confidentiality, there is little information on induction-heating MOCVD reactor design available in print and on the internet. We thus appreciate the following people who have generously provided suggestions and advice: Dr. G. Tompa and the engineers at Structured Materials Industries, Dr. K. Balakrishnan at BRIDGE, Dr. J. Creighton at Sandia National Laboratories, Prof. Z. Sitar and Prof. R. Collazo at North Carolina State University, Dr. A. Paranjpe at Veeco Instruments, Mr. J. Schmitt at Nitride Solution, Dr. A. Boyd at AIXTRON, and Prof. S. Novikov at the University of Nottingham. This research was sponsored by the KAUST Baseline Fund BAS/1/1664-01-01 and Equipment Fund BAS/1/1664-01-07.

中文翻译:

显着提高加热效率并减少有害磁耦合的感应加热 MOCVD 反应器

由于竞争和由此产生的保密性,印刷版和互联网上几乎没有关于感应加热 MOCVD 反应器设计的信息。因此,我们感谢以下慷慨提供建议和建议的人:G. Tompa 博士和 Structured Materials Industries 的工程师、BRIDGE 的 K. Balakrishnan 博士、桑迪亚国家实验室的 J. Creighton 博士、Z. Sitar 教授和北卡罗来纳州立大学的 R. Collazo 教授、Veeco Instruments 的 A. Paranjpe 博士、Nitride Solution 的 J. Schmitt 先生、AIXTRON 的 A. Boyd 博士和诺丁汉大学的 S. Novikov 教授。这项研究由 KAUST 基线基金 BAS/1/1664-01-01 和设备基金 BAS/1/1664-01-07 赞助。
更新日期:2018-04-01
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