Aiming to pursue a micromirror possessing many desired characteristics, such as linear control, low power consumption, fast response, and easy fabrication, a new piezoelectric actuation strategy is presented. Different from conventional piezoelectric actuation cases, we first propose using AlN film as the active layer for actuating the micromirror. Owing to its good CMOS compatible deposition and patterning techniques, the AlN based piezoelectric micromirror has been successfully fabricated with a modified silicon-on-insulator-based microelectromechanical system (MEMS) process. At the same time, various mirror movement modes operating at high frequencies and excellent linear relationship between the movement and the control signal both have been experimentally demonstrated.

中文翻译：

---

AlN基压电微镜

为了追求一种具有线性控制，低功耗，快速响应，易于制造等特性的微镜，提出了一种新的压电驱动策略。与常规的压电驱动情况不同，我们首先建议使用AlN膜作为用于驱动微镜的有源层。由于其良好的CMOS兼容沉积和构图技术，已经成功地使用基于绝缘体上硅的微机电系统（MEMS）工艺成功地制造了基于AlN的压电微镜。同时，已经通过实验证明了在高频率下操作的各种镜运动模式以及该运动和控制信号之间的极好的线性关系。