In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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在过去的十年中，具有压阻读数的微机电系统（MEMS）SU-8聚合物悬臂与分子识别技术的进步相结合，已发现了多种应用，特别是在化学和生物传感领域。与传统的基于固态半导体的压阻悬臂梁传感器相比，SU-8聚合物悬臂梁具有更好的灵敏度以及减少的材料和制造成本方面的优势。近年来，由于基于SU-8聚合物的悬臂梁传感器的高性价比，许多研究人员已经对其作为传感平台的潜力进行了研究。在本文中，我们将严格审查基于表面应力的压阻SU-8聚合物悬臂梁传感器的设计，制造和性能方面。详细讨论了基于表面应力的压阻式悬臂传感器从固态半导体材料到聚合物（尤其是SU-8聚合物）的演变。还设计了表面应力产生的理论原理及其在悬臂传感技术中的应用。解释了SU-8聚合物悬臂在悬臂式堆叠中具有不同材料组成的变体。此外，还详细说明了压阻SU-8聚合物悬臂梁传感器的材料选择，几何设计参数和制造工艺之间的相互依赖性以及它们对传感器响应的累积影响。除了与设计，制造和性能相关的因素，本文还描述了将SU-8聚合物悬臂工程化为通用感测平台时遇到的各种挑战，例如温度和湿度的脆弱性。这篇评论文章将为研究人员了解基于表面应力的压阻SU-8悬臂梁传感器的特性和功能提供指导。

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