Abstract Nanoscale growth striations, induced by the crystal rotation and melt convection, are in-situ detected by the growth interface electromotive force (GEMF) spectrum during Czochralski (CZ) crystal growth. Specifically, the intensity and period of rotation and convection striations could be precisely revealed under different rotation rates. This is because the GEMF spectrum is affected by the combination effort of temperature difference in crystal rotation path and the melt flow in growth interface. Furthermore, the spectrum analysis (Fourier transform) reveals remarkable characteristics of periodic flow oscillation. More interestingly, in different rotation rates, the corresponding convection period and intensity show particular regularity that could barely be observed in semitransparent and high-temperature melt. Therefore, the GEMF spectrum reflects the subtle changes of a growing crystal that is far beyond the detecting precision of sensors in current CZ equipment. On the basis of this paper and our previous work, the real-time feedback of multiscale striations is established. GEMF spectrum could be a promising approach to reveal striation formation mechanism and optimize crystal quality.

中文翻译：

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通过生长界面电动势谱原位检测对流和旋转条纹

摘要 在直拉 (CZ) 晶体生长过程中，通过生长界面电动势 (GEMF) 光谱原位检测由晶体旋转和熔体对流引起的纳米级生长条纹。具体来说，可以精确地揭示不同旋转速率下旋转和对流条纹的强度和周期。这是因为 GEMF 光谱受晶体旋转路径中的温差和生长界面中的熔体流动共同作用的影响。此外，频谱分析（傅立叶变换）揭示了周期性流动振荡的显着特征。更有趣的是，在不同的旋转速率下，相应的对流周期和强度表现出特殊的规律性，这在半透明和高温熔体中几乎观察不到。所以，GEMF 光谱反映了晶体生长的细微变化，远远超出了当前 CZ 设备中传感器的检测精度。在本文和我们之前工作的基础上，建立了多尺度条纹的实时反馈。GEMF 光谱可能是揭示条纹形成机制和优化晶体质量的一种很有前景的方法。