当前位置: X-MOL 学术J. Am. Ceram. Soc. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Amorphous Ge-Sb-Se thin films fabricated by co-sputtering: properties and photosensitivity
Journal of the American Ceramic Society ( IF 3.9 ) Pub Date : 2018-02-01 , DOI: 10.1111/jace.15453
Tomáš Halenkovič 1, 2 , Jan Gutwirth 1 , Petr Němec 1 , Emeline Baudet 1 , Marion Specht 3 , Yann Gueguen 3 , Jean-Christophe Sangleboeuf 3 , Virginie Nazabal 1, 2
Affiliation  

Amorphous Ge-Sb-Se thin films were fabricated by a rf-magnetron co-sputtering technique employing the following cathodes GeSe2, Sb2Se3, and Ge28Sb12Se60. The influence of the composition, determined by energy-dispersive X-ray spectroscopy, on the optical properties was studied. Optical properties were analyzed based on variable angle spectroscopic ellipsometry and UV-Vis-NIR spectrophotometry. The results show that the optical bandgap range 1.35-2.08 eV with corresponding refractive index ranging from 3.33 to 2.36 can be reliably covered. Furthermore, morphological and topographical properties of selenide-sputtered films studied by scanning electron microscopy and atomic force microscopy showed a good quality of fabricated films. In addition, structure of the films was controlled using Raman scattering spectroscopy. Finally, irreversible photoinduced changes by means of change in optical bandgap energy and refractive index of co-sputtered films were studied revealing the photobleaching effect in Ge-rich films when irradiated by near-bandgap light under Ar atmosphere. The photobleaching effect tends to decrease with increasing antimony content.

中文翻译:

共溅射制备的非晶 Ge-Sb-Se 薄膜:性能和光敏性

非晶 Ge-Sb-Se 薄膜是通过射频磁控共溅射技术制造的,采用以下阴极 GeSe2、Sb2Se3 和 Ge28Sb12Se60。研究了由能量色散 X 射线光谱测定的组成对光学性质的影响。基于可变角度光谱椭偏仪和UV-Vis-NIR分光光度法分析光学特性。结果表明,可以可靠地覆盖1.35-2.08 eV的光学带隙范围,相应的折射率范围为3.33-2.36。此外,通过扫描电子显微镜和原子力显微镜研究的硒化物溅射薄膜的形态和形貌特性表明制造的薄膜质量良好。此外,使用拉曼散射光谱控制薄膜的结构。最后,通过改变共溅射薄膜的光学带隙能量和折射率,研究了不可逆的光致变化,揭示了在 Ar 气氛下用近带隙光照射富锗薄膜时的光漂白效应。随着锑含量的增加,光漂白效果趋于降低。
更新日期:2018-02-01
down
wechat
bug