Penetrating neural probe arrays are powerful bio-integrated devices for studying basic neuroscience and applied neurophysiology, underlying neurological disorders, and understanding and regulating animal and human behavior. This paper presents a penetrating microprobe array constructed in thin and flexible fashion, which can be seamlessly integrated with the soft curvy substances. The function of the microprobes is enabled by transfer printed ultra-thin Si optoelectronics. As a proof-of-concept device, microprobe array with Si photodetector arrays are demonstrated and their capability of mapping the photo intensity in space are illustrated. The design strategies of utilizing thin polyimide based microprobes and supporting substrate, and employing the heterogeneously integrated thin optoelectronics are keys to accomplish such a device. The experimental and theoretical investigations illustrate the materials, manufacturing, mechanical and optoelectronic aspects of the device. While this paper primarily focuses on the device platform development, the associated materials, manufacturing technologies, and device design strategy are applicable to more complex and multi-functionalities in penetrating probe array-based neural interfaces and can also find potential utilities in a wide range of bio-integrated systems.

穿透式神经探针阵列是功能强大的生物集成设备，用于研究基础神经科学和应用神经生理学，潜在的神经系统疾病以及理解和调节动物和人类行为。本文提出了一种以薄而灵活的方式构造的可穿透的微探针阵列，该阵列可以与柔软的弯曲物质无缝集成。微探针的功能通过转移印刷超薄Si光电技术实现。作为概念验证设备，演示了带有Si光电探测器阵列的微探针阵列，并说明了它们在空间中映射光强的能力。利用薄的基于聚酰亚胺的微探针和支撑衬底以及采用异质集成的薄光电器件的设计策略是实现这种器件的关键。实验和理论研究说明了该器件的材料，制造，机械和光电方面。尽管本文主要侧重于设备平台开发，但相关的材料，制造技术和设备设计策略适用于穿透基于探针阵列的神经接口的更复杂和多功能，并且还可以在广泛的应用领域中找到潜在的效用。生物集成系统。