The demand to meet advanced substrate requirements in terms of electrical, mechanical, thermal, and dielectric properties has led to an increasing interest in low temperature co-fired ceramics (LTCC). However, LTCC materials suffer from high permittivity. We recently showed that the wet-chemical porosification under acidic conditions allows the reduction of the permittivity of LTCCs in the as-fired state. In the present study, potassium hydroxide solution was employed as an alternative etchant which features a suitable bearing plane for further metallization lines. Various characterization techniques, including scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and electron energy loss spectroscopy were used for investigation of the morphology and chemical composition of the substrates. Three-dimensional information of the surface topography was acquired by means of MeX^® Alicona software and the obtained roughness parameters confirmed the advantage of the proposed approach over acid treatment when targeting an enhanced surface quality.

满足电，机械，热和介电性能方面的高级基材要求的需求已引起人们对低温共烧陶瓷（LTCC）的兴趣日益增加。但是，LTCC材料的介电常数高。我们最近表明，在酸性条件下进行湿化学孔隙化可以降低烧成后LTCC的介电常数状态。在本研究中，采用氢氧化钾溶液作为替代蚀刻剂，其特征是适用于其他金属化线的支承面。使用各种表征技术，包括扫描和透射电子显微镜，能量色散X射线光谱法，X射线衍射分析和电子能量损失光谱法，研究了基材的形貌和化学组成。表面形貌的三维资料是通过MEX方式取得^® Alicona软件和所获得的粗糙度参数靶向增强的表面质量时确认所提出的方法在酸处理的优点。