We report the electrochemical performance of amorphous LiCuPO₄ thin films obtained by radio frequency sputtering as a cathode material for Li‐ion microbatteries. The thin films were characterized by X‐ray diffraction, scanning electron microscopy, profilometry and electrochemical techniques. Charge/discharge profiles and cycling performance were evaluated in lithium electrochemical test cells. Cyclic voltammogram of the LiCuPO₄ film shows the typical redox reaction peak at ∼ 1.9 V vs. Li/Li⁺. A discharge capacity of 160 mAh g⁻¹ (50 μAh cm⁻²) is attained for the first cycle at C/10 to reach a stable capacity of 70 mAh g⁻¹ (22 μAh cm⁻²) with good stability over 160 cycles. For comparison, the electrochemical performance of a crystalline LiCuPO₄ film was investigated. The first discharge could deliver a high capacity of around 375 mAh g⁻¹ at C/10, but the capacity decayed quickly to a low capacity of 11 mAh g⁻¹ over 50 cycles. The results show that the LiCuPO₄ amorphous materials can be considered as the exciting cathode candidate for Li‐ion microbatteries.

中文翻译：

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溅射沉积非晶态LiCuPO4薄膜作为锂离子微型电池的阴极材料

我们报告了通过射频溅射获得的非晶态LiCuPO ₄薄膜的电化学性能，该薄膜用作锂离子微型电池的阴极材料。通过X射线衍射，扫描电子显微镜，轮廓分析和电化学技术对薄膜进行了表征。在锂电化学测试电池中评估了充电/放电曲线和循环性能。LiCuPO ₄膜的循环伏安图显示典型的氧化还原反应峰在1.9 V vs .。Li / Li ⁺。在C / 10的第一个循环中达到160 mAh g ^-1（50μAhcm ^-2）的放电容量，以达到70 mAh g ^-1（22μAhcm ^-2）的稳定容量）在160个周期内具有良好的稳定性。为了比较，研究了结晶的LiCuPO ₄膜的电化学性能。首次放电可以在C / 10时提供约375 mAh g ^-1的高容量，但在50个循环中，容量迅速衰减至11 mAh g ^-1的低容量。结果表明，LiCuPO ₄非晶态材料可以看作是锂离子微电池的令人兴奋的阴极候选材料。