We report a high-contrast metastructure (HCM) mirror as a novel beam-shaping element for vertical-cavity surface-emitting lasers (VCSELs). The metastructure is monolithically integrated as a part of the VCSEL, working both as a microelectromechanical tunable mirror and output beam shaper. While providing broadband, high reflection to support lasing of the VCSEL, its angular transmission characteristics can be tailored to shape the angular profile of the output beam. Various far-field emission patterns are demonstrated for single-mode, 1550 nm VCSELs with different HCM designs. We further demonstrated two-faced VCSELs with different mode profiles from their two mirrors, for the first time, to the best of our knowledge. This bifunctional integrated metastructure opens new avenues to engineer a VCSEL’s emission properties, and shows great promise for applications that desire highly compact emitters integrated on a chip to provide versatile functionalities.

中文翻译：

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用于整形VCSEL的整体式高对比度元结构

我们报告高对比度元结构（HCM）镜作为垂直腔面发射激光器（VCSEL）的新型光束整形元件。元结构作为VCSEL的一部分被整体集成，既可以用作微机电可调镜，也可以用作输出光束整形器。在提供宽带，高反射率以支持VCSEL激光发射的同时，可以调整其角度透射特性以塑造输出光束的角度轮廓。针对具有不同HCM设计的单模1550 nm VCSEL，展示了各种远场发射模式。据我们所知，我们还首次展示了双面VCSEL，它们的模式轮廓与它们的两个反射镜不同。这种双功能的集成元结构为设计VCSEL的发射特性开辟了新途径，