Abstract In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrystalline graphite (for the carbon sample) or fullerene-like (for the CN sample), with both samples having a graphitic nanostructure vertically ordered throughout the film. Their thermal diffusivity was computed using transient grating spectroscopy in order to compare the impact of the material's nanostructure on its thermal property as well as benchmarking the performance of CN. It was found that the thermal properties of carbon thin films were decreased when doped with nitrogen, which is attributed to the increased atomic disorder introduced by the nitrogen cross-linking, impacting the phonon propagation. The impact of nitrogen doping on thermal properties opens new avenues in engineering materials with tailored and varying thermal properties at the microscale.

中文翻译：

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通过瞬态光栅光谱对无定形和织构碳和氮化碳薄膜进行热研究

摘要 在这项研究中，我们正在考虑一种使用高功率脉冲磁控溅射 (HiPIMS) 生长氮化碳 (CN) 薄膜的新方法。碳和 CN 薄膜生长在具有不同纳米晶纹理的硅衬底上：一些样品是无定形的，而另一些是纳米晶石墨（对于碳样品）或类富勒烯（对于 CN 样品），两个样品都具有垂直的石墨纳米结构整部电影都是有序的。使用瞬态光栅光谱计算它们的热扩散率，以比较材料的纳米结构对其热性能的影响以及对 CN 的性能进行基准测试。发现当掺杂氮时，碳薄膜的热性能降低，这归因于氮交联引入的原子无序增加，影响了声子的传播。氮掺杂对热性能的影响为工程材料开辟了新的途径，在微尺度上具有定制和不同的热性能。