Abstract Silane is a major silicon source gas for production of polycrystalline silicon. Production of polysilicon from silane has several benefits: lower energy consumption, much easily obtaining electronical polysilicon and less impact on the environment. There is, however, a major challenge that silane homogenous decomposition may result in amorphous silicon powders (fines) formation. In this review we focus on the fines formation with silane as feed gas. Firstly, this paper reports the situation of the production of silane source gas, the mechanism of the silane decomposition and fines formation. The reactor design, operation parameters and carrier gas, all of these would affect fines formation. This study also reviews on emerging trends in these aspects in outcome studies.

中文翻译：

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从硅烷热解生产多晶硅：细粉形成综述

摘要 硅烷是生产多晶硅的主要硅源气体。用硅烷生产多晶硅有几个好处：能耗低，更容易获得电子多晶硅，对环境的影响更小。然而，存在一个重大挑战，即硅烷均质分解可能导致形成非晶硅粉末（细粉）。在这篇综述中，我们关注以硅烷为原料气的细粉形成。本文首先报道了硅烷源气的生产情况、硅烷分解和细粉形成的机理。反应器设计、操作参数和载气，所有这些都会影响细粉的形成。本研究还回顾了结果研究中这些方面的新趋势。