A 2D laser lithography protocol for controlled grafting of polymer brushes in a single-step is presented. A series of polyacrylates were grafted from silicon substrates via laser-induced copper-mediated radical polymerization. Film thicknesses up to 39 nm were reached within 125 μs of exposure to UV laser light (351 nm). Successful block copolymerization underpinned the controlled nature of the grafting methodology. The resolution of a small structure of grafted PHEA reached 270 μm and was limited by the type of laser used in the study. Further, a checkerboard pattern of PtBA and POEGA was produced and imaged via time-of-flight secondary ion mass spectrometry (ToF-SIMS), and X-ray photoelectron spectroscopy (XPS).

中文翻译：

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通过光诱导铜介导的自由基聚合在硅基板上进行2D激光光刻

提出了一种二维激光光刻协议，用于一步控制聚合物刷的接枝。通过激光诱导的铜介导的自由基聚合，从硅基底接枝了一系列聚丙烯酸酯。在暴露于UV激光（351 nm）的125μs内达到39 nm的膜厚。成功的嵌段共聚强化了接枝方法的可控性。PHEA接枝小结构的分辨率达到270μm，并受到研究中所用激光类型的限制。此外，产生PtBA和POEGA的棋盘图案，并通过飞行时间二次离子质谱（ToF-SIMS）和X射线光电子能谱（XPS）成像。