Optoelectronic applications such as solar cells and light-emitting diodes would benefit from glass substrates with both high transparency and high haze to improve power conversion and extraction efficiencies, respectively. In this Letter, we demonstrate glass with grass-like nanostructures that displays ultrahigh transparency and ultrahigh haze (both over 95% at wavelength 550 nm). The nanograss is fabricated by a scalable maskless reactive ion etching process in fused silica where the height is controlled via the etch time. We demonstrate that shorter nanograss ($<2.5\mathrm{\mu m}$ height) improves the antireflection properties of the glass and that longer grass tends to increase haze monotonically. Ultrahigh haze, over 99%, may also be achieved with longer nanograss ($>6\mathrm{\mu m}$ height), though the transmission decreases slightly to less than 92%. Finally, we demonstrate that various fluids with a similar index of refraction as the glass may be used to switch the haze of these substrates.

中文翻译：

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超高透明，超高雾度的纳米草玻璃，具有流体诱导的可切换雾度

诸如太阳能电池和发光二极管之类的光电应用将受益于具有高透明度和高雾度的玻璃基板，分别改善功率转换和提取效率。在这封信中，我们演示了具有草状纳米结构的玻璃，该玻璃具有超高的透明度和超高的雾度（在550 nm波长处均超过95％）。纳米草是通过可缩放的无掩模反应离子刻蚀工艺在熔融石英中制造的，其中高度是通过刻蚀时间控制的。我们证明了较短的纳米草（$<2.5\mathrm{微米}$高度）可提高玻璃的抗反射性能，而较长的草则倾向于单调增加雾度。更长的纳米草也可以达到99％以上的超高雾度（$>6\mathrm{微米}$高度），但透射率会略微下降到小于92％。最后，我们证明了具有与玻璃相似的折射率的各种流体可用于切换这些基材的雾度。