Abstract We demonstrate the application of a liquid-processed doped silicon precursor as a doping source for the fabrication of interdigitated back contact solar cells. We integrate phosphorus- as well as boron-doped liquid silicon in our n -type interdigitated back contact cell process based on laser-structuring. The cell with the phosphorus back surface field from liquid silicon has an efficiency of 20.9% and the cell with the boron emitter from liquid silicon has an efficiency of 21.9%. We measure saturation current densities of 34 fA cm −2 on phosphorus-doped layers with a sheet resistance of 108 Ω/sq and 18 fA cm −2 on boron-doped layers with a sheet resistance of 140 Ω/sq using passivated test samples.

中文翻译：

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用于太阳能电池局部掺杂的可印刷液态硅

摘要 我们展示了液体处理的掺杂硅前驱体作为掺杂源用于制造叉指背接触太阳能电池的应用。我们在基于激光构造的 n 型叉指背接触电池工艺中集成了磷和硼掺杂的液态硅。具有来自液态硅的磷背表面场的电池具有 20.9% 的效率，具有来自液态硅的硼发射极的电池具有 21.9% 的效率。我们使用钝化的测试样品在薄层电阻为 108 Ω/sq 的磷掺杂层上测量 34 fA cm -2 的饱和电流密度，在薄层电阻为 140 Ω/sq 的硼掺杂层上测量饱和电流密度为 18 fA cm -2 。