Recent advances in the field of microelectromechanical systems (MEMS) have generated great interest in the substitution of inorganic microcantilevers by organic ones, due to their low cost, high flexibility and a simplified fabrication by means of printing methods. Here, we present the integration of electrostrictive nanocomposites into organic microcantilever resonators specifically designed for mechanical energy harvesting from ambient vibrations. Strain sensitive nanocomposite materials composed of reduced graphene oxide (rGO) dispersed in polydimethylsiloxane (PDMS) are integrated into all-organic MEMS by means of an innovative low-cost and environment friendly process by combining printing techniques and xurography. Static tests of the electrostrictive nanocomposite with 3.7 wt% rGO show good performances with variations of capacitance that exceeds 4% for strain values lower than 0.55% as the microcantilever is bent. The results in dynamic mode suggest that the organic MEMS meet the requirements for vibration energy harvesting. With an applied sinusoidal acceleration (amplitude 0.5 g, frequency 15 Hz) a power density of 6 μW/cm³ is achieved using a primitive circuit.

微机电系统（MEMS）领域的最新进展因其低成本，高柔韧性和通过印刷方法的简化制造，引起了人们对用有机微悬臂梁替代无机微悬臂梁的极大兴趣。在这里，我们介绍了电致伸缩纳米复合材料到有机微悬臂梁谐振器的集成，该谐振器专门设计用于从环境振动中收集机械能。通过结合印刷技术和X射线照相术的低成本和环保创新工艺，将由分散在聚二甲基硅氧烷（PDMS）中的还原性氧化石墨烯（rGO）组成的应变敏感纳米复合材料集成到全有机MEMS中。电致伸缩纳米复合材料的静态测试3。当微悬臂梁弯曲时，应变值低于0.55％时，7 wt％rGO表现出良好的性能，电容变化超过4％。动态模式下的结果表明有机MEMS符合振动能量收集的要求。施加正弦加速度（振幅0.5 g，频率15 Hz）时，功率密度为6μW/ cm^图3是使用原始电路实现的。