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Superior Robust Ultrathin Single-Crystalline Silicon Carbide Membrane as a Versatile Platform for Biological Applications
ACS Applied Materials & Interfaces ( IF 9.5 ) Pub Date : 2017-11-20 00:00:00 , DOI: 10.1021/acsami.7b15381
Tuan-Khoa Nguyen 1 , Hoang-Phuong Phan 1 , Harshad Kamble 1 , Raja Vadivelu 1 , Toan Dinh 1 , Alan Iacopi 1 , Glenn Walker 1 , Leonie Hold 1 , Nam-Trung Nguyen 1 , Dzung Viet Dao 1, 2
Affiliation  

Micromachined membranes are promising platforms for cell culture thanks to their miniaturization and integration capabilities. Possessing chemical inertness, biocompatibility, and integration, silicon carbide (SiC) membranes have attracted great interest toward biological applications. In this paper, we present the batch fabrication, mechanical characterizations, and cell culture demonstration of robust ultrathin epitaxial deposited SiC membranes. The as-fabricated ultrathin SiC membranes, with an ultrahigh aspect ratio (length/thickness) of up to 20 000, possess high a fracture strength up to 2.95 GPa and deformation up to 50 μm. A high optical transmittance of above 80% at visible wavelengths was obtained for 50 nm membranes. The as-fabricated membranes were experimentally demonstrated as an excellent substrate platform for bio-MEMS/NEMS cell culture with the cell viability rate of more than 92% after 72 h. The ultrathin SiC membrane is promising for in vitro observations/imaging of bio-objects with an extremely short optical access.

中文翻译:

出色的耐用超薄单晶碳化硅膜,是生物应用的多功能平台

由于其微型化和整合能力,微机械膜是有希望的细胞培养平台。具有化学惰性,生物相容性和集成性的碳化硅(SiC)膜引起了人们对生物学应用的极大兴趣。在本文中,我们介绍了坚固的超薄外延沉积SiC膜的分批制备,机械表征和细胞培养演示。所制造的超薄SiC膜具有高达20000的超高长宽比(长度/厚度),具有高达2.95 GPa的高断裂强度和高达50μm的变形。对于50nm的膜,在可见波长下获得了高于80%的高透光率。实验证明,制成的膜是生物MEMS / NEMS细胞培养的极佳底物平台,72 h后细胞存活率超过92%。超薄SiC膜有望以极短的光学通道用于生物物体的体外观察/成像。
更新日期:2017-11-20
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