Interdiffusion processes between aluminum enriched PVD-sputtered silica thin films and industrial float soda-lime silicate glass substrates are quantitatively studied using SIMS analysis. Heat treatments are performed at temperatures close or above the glass transition temperature of the float glass. Aluminum doping of the film is shown to strongly increase the migration of alkali from the glass substrate to the silica thin film. In particular the final alkali content in the film exhibits a linear scaling with the aluminum concentration. An interdiffusion process is evidenced between bulk alkali ions and protons originating from a significant water content in the as-deposited silica film. Experimental measurements of sodium concentration are shown to be consistent with a simple thermodynamic model based on the equilibration of the activity of sodium between the film and the glass substrate. This article is protected by copyright. All rights reserved.

中文翻译：

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从浮法玻璃到 PVD ​​溅射二氧化硅薄膜的铝增强碱扩散

使用 SIMS 分析定量研究了富铝 PVD ​​溅射二氧化硅薄膜和工业浮法钠钙硅酸盐玻璃基板之间的相互扩散过程。在接近或高于浮法玻璃的玻璃化转变温度的温度下进行热处理。薄膜的铝掺杂显示出强烈增加碱从玻璃基板到二氧化硅薄膜的迁移。特别是薄膜中的最终碱含量与铝浓度呈线性比例关系。大量碱离子和质子之间存在相互扩散过程，这些质子源自沉积态二氧化硅薄膜中的大量水分。钠浓度的实验测量表明与基于薄膜和玻璃基板之间钠活性平衡的简单热力学模型一致。本文受版权保护。版权所有。