Nanoporous conformal coating is an important class of materials for electrocatalysis, water purification, antireflective coatings, etc. Common synthesis methods of porous films often require harsh conditions (high temperature and high plasma power) or specific substrate materials. Here, we report a plasma-enhanced sequential infiltration synthesis (PE SIS) as a new platform toward deposition of nanoporous inorganic films. PE SIS is based on oxygen-plasma-induced rapid conversion of metal precursors selectively adsorbed in a block-copolymer template. Porosity and thickness of resulting materials can be easily controlled by characteristics of the template. PE SIS is conducted under gentle conditions, and can be applied to a broad range of substrates, including water-sensitive surfaces. PE SIS offers adventurous rapid infiltration with improved ability to obtain highly interconnected porous alumina films with thicknesses up to 5 μm. We show that full infiltration of the polar domain of the polymer template can be achieved upon initial exposure to TMA, followed by its oxygen-plasma-induced conversion into a functional material. Since different types of plasma (such as oxygen, nitrogen, hydrogen, etc.) induce conversion of a broad range of metal precursors, PE SIS opens a new approach for synthesis of highly porous materials with various elemental compositions and stoichiometries.

中文翻译：

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通过聚合物模板的等离子体增强顺序渗透快速合成纳米孔保形涂层

纳米多孔保形涂层是电催化、水净化、减反射涂层等领域的一类重要材料。多孔薄膜的常见合成方法往往需要苛刻的条件（高温和高等离子体功率）或特定的基材材料。在这里，我们报告了等离子体增强连续渗透合成（PE SIS）作为纳米多孔无机薄膜沉积的新平台。PE SIS 基于氧等离子体诱导选择性吸附在嵌段共聚物模板中的金属前体的快速转化。所得材料的孔隙率和厚度可以通过模板的特性轻松控制。PE SIS 在温和条件下进行，可应用于多种基材，包括水敏感表面。PE SIS 提供大胆的快速渗透，并提高了获得厚度高达 5 μm 的高度互连的多孔氧化铝薄膜的能力。我们表明，在最初暴露于 TMA 后，可以实现聚合物模板极性域的完全渗透，然后通过氧等离子体诱导转化为功能材料。由于不同类型的等离子体（如氧、氮、氢等）会诱导多种金属前体的转化，PE SIS 开辟了一种合成具有各种元素组成和化学计量的高多孔材料的新方法。