Vertically integrated color sensors with plasmonic reflectors are realized. The complete color information is detected at each color pixel of the sensor array without using optical filters. The spectral responsivity of the sensor is tuned by the applied electric bias and the design of the plasmonic reflector. By introducing an interlayer between the lossy metal back reflector and the sensor, the reflectivity can be modified over a wide spectral range. The detection principle is demonstrated for a silicon thin film detector prepared on a textured silver back reflector. The sensor can be used for RGB color detection replacing conventional color sensors with optical filters. Combining detectors with different spectral reflectivity of the back reflector allows for the realization of multispectral color sensors covering the visible and the near-infrared spectral range.

中文翻译：

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带有等离子反射镜的可调多光谱颜色传感器

实现了具有等离子反射器的垂直集成颜色传感器。在不使用光学滤镜的情况下，在传感器阵列的每个颜色像素处检测到完整的颜色信息。传感器的光谱响应度通过施加的电偏压和等离激元反射器的设计进行调整。通过在有损金属背反射器和传感器之间引入一个中间层，可以在很宽的光谱范围内改变反射率。演示了在带纹理的银背反射器上制备的硅薄膜检测器的检测原理。该传感器可用于RGB颜色检测，用光学滤镜代替常规颜色传感器。