We show that using maskless photolithography and the lift-off technique, patterned yttrium iron garnet thin films possessing ultra-low Gilbert damping can be accomplished. The films of 70 nm thickness were grown on (001)-oriented gadolinium gallium garnet by means of pulsed laser deposition, and they exhibit high crystalline quality, low surface roughness, and the effective magnetization of 127 emu/cm3. The Gilbert damping parameter is as low as 5×10−4. The obtained structures have well-defined sharp edges which along with good structural and magnetic film properties pave a path in the fabrication of high-quality magnonic circuits and oxide-based spintronic devices.

中文翻译：

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剥离结构钇铁石榴石薄膜中的超低阻尼

我们表明，使用无掩模光刻和剥离技术，可以实现具有超低吉尔伯特阻尼的图案化钇铁石榴石薄膜。通过脉冲激光沉积在 (001) 取向的钆镓石榴石上生长 70 nm 厚的薄膜，它们具有高结晶质量、低表面粗糙度和 127 emu/cm3 的有效磁化强度。吉尔伯特阻尼参数低至 5×10−4。所获得的结构具有明确定义的锋利边缘，以及良好的结构和磁性薄膜特性，为制造高质量磁子电路和基于氧化物的自旋电子器件铺平了道路。